Abstract: A novel microdetector array (MDA) for monitoring electron beam (eBeam) and extreme ultraviolet (EUV) lithography processes in 5 nm and beyond FinFET technology is first-time presented. This ...
Abstract: This work deals with the synthesis of time-modulated arrays (TMAs) for cognitive radio systems, in which the harmonic radiations arising from the periodic modulation of the elements in the ...
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