Abstract: This letter presents a dual-mode piezoelectric microelectromechanical system (MEMS) resonator with an in-chip micro-oven for resonator temperature control. The piezoelectric MEMS resonator ...
Abstract: This work proposed a compact thermoelectric cooler (TEC)-controlled MEMS gyroscope system aimed at mitigating bias and scale factor drift. The system was implemented by encapsulating the ...
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