SAN JOSE, Calif. — Novellus Systems Inc. moved to lower the cost of chemical mechanical planarization (CMP) Monday (June 21) by rolling out a 300-mm tool that it claimed could be used down to the ...
Novellus Systems Inc. says it has taken what was good about SpeedFam-IPEC's technology and fixed what wasn't with Xceda. The Silicon Valley-based back-end-of-line process tool vendor today unveiled ...
Producing high-purity wafers via the CMP process is a critical application and the halting of harmful slurry-DIW ...
ACM Research Introduces New Post-CMP Cleaning Tool for Silicon and SiC Wafer Substrate Manufacturing
FREMONT, Calif., July 12, 2022 (GLOBE NEWSWIRE) -- ACM Research, Inc. (ACM) (NASDAQ: ACMR), a leading supplier of wafer processing solutions for semiconductor and advanced wafer-level packaging (WLP) ...
The semiconductor industry is constantly marching toward thinner films and complex geometries with smaller dimensions, as well as newer materials. The number of chemical mechanical planarization (CMP) ...
Gearing up for next week’s Semicon West tradeshow in San Francisco and San Jose,Applied Materials Inc. today rolled out its Silicon Etch Hart chamber for etching highaspect ration trenches to form ...
It's critical that the surface of silicon wafers be as flat as possible so that as each metal layer is patterned, you minimize the risk of moving in and out of the focal plane of the imaging system.
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